A simulation design of cantilever beam type Microforce detection sensor based on photoelectric position sensitive detector (PSD)

X. Li, D. Su, D. Zeng, L. Sun, Progress of micro and nano solid experimental mechanics based on the optical and the probe techniques. Chin. J. Solid Mech. 31(6), 664–678 (2010)

Google Scholar 

Y. Wei, Q. Xu, An overview of micro-force sensing techniques. Sens. Actuators A: Phys. 234, 359–374 (2015)

Article  ADS  Google Scholar 

H. Zang, X. Zhang, B. Zhu, S. Fatikow, Recent advances in non-contact force sensors used for micro/nano manipulation. Sens. Actuators A: Phys. 296, 155–177 (2019)

Article  ADS  Google Scholar 

Y. Wei, Q. Xu, A survey of Force-Assisted robotic cell microinjection technologies. IEEE Trans. Autom. Sci. Eng. 16(2), 931–945 (2019)

Article  Google Scholar 

Y. Yang, M. Zhao, H. Yinguo, H. Zhang, N. Guo, Y. Zheng, Micro-force sensing techniques and traceable reference forces: a review. Meas. Sci. Technol. 33, 114010 (2022)

Article  ADS  Google Scholar 

G. Adam, M. Boudaoud, V. Reynaud, J. Agnus, D. J. Cappelleri, C. Clévy, An overview of microrobotic systems for microforce sensing. Annual Rev. Control Rob. Auton. Syst. 7, 359–383 (2024)

Article  Google Scholar 

Z. Ren, D. Wang, W. Jing, S. Wang, Z. Jiang, J. Ren, H. Gu and X. Wei, A probe-type high-precision micro-force sensor based on quartz DETF resonator. Meas. Sci. Technol. 32(11), 115107 (2021)

Article  ADS  Google Scholar 

Z. Cheng, X. Liu, Y. Lei, Q. Pan, R. Li, Development of a High-Precision optical force sensor with µN-Level resolution. IEEE Sens. J. 22(13), 12738–12745 (2022)

Article  ADS  Google Scholar 

M. Zou, C. Liao, Y. Chen, Z. Gan, S. Liu, D. Liu, L. Liu, Y. Wang, Measurement of Interfacial Adhesion Force with a 3D-Printed Fiber-Tip Microforce Sensor, Biosensors 12(8), 629 (2022)

X. Zhang, H. Liu, Y. Wang, Y. Xiong, H. Niu, FBG-based three-dimensional micro-force sensor with axial force sensitivity-enhancing and temperature compensation for micro-forceps. Opt. Express. 31, 40538–40556 (2023)

Article  ADS  Google Scholar 

X. Guo, A. Zhao, Y. Zhang, H. Jiang, L. Zeng, A. Knoll, Y. Ying, M. Zhou, Design and testing of a new microinjector with FBG force sensor for robot-assisted single cell microinjection. Measurement. 221, 113510 (2023)

Article  Google Scholar 

H. Zang, S. Pang, B. Zhu, H. Zhang, H. Li, S. Fatikow, Development of a microforce sensor based on a Fiber Bragg grating used for Micro-/Nanomanipulation. IEEE Trans. Instrum. Meas. 72, 1–10 (2023)

Article  Google Scholar 

B. Liu, Q. Zhang, S. Liu, C. Liao, J. Zhong, J. He, High-Resolution Micro force sensing using a microbubble probe resonator. J. Lightwave Technol. 42(5), 1748–1753 (2024)

Article  ADS  Google Scholar 

H. Gao, T. Qi, H. Ren, Q. Li, Y. Ma, T. Xiao, Y. Ma, J. Wang, Improved design of optical-microforce sensor with high thermal-mechanical stability for insulation charge ellipsometer testing application. Sens. Actuators A: Phys. 380, 116035 (2024)

Article  Google Scholar 

W. Liang, X. Li, S. Zhong, Q. Zhang, J. Lin, Three-dimensional micro-force measurement method based on broadband optical coherence. Measurement. 234, 114845 (2024)

Article  Google Scholar 

S. S. Kumat, P. S. Shiakolas, Design, prototyping, and characterization of a Micro-Force sensor intended for tissue assessment in confined spaces. IEEE Sens. J. 24(12), 18937–18947 (2024)

Article  Google Scholar 

Z. Lyu, Q. Xu, A microforce sensor incorporating a flexible Force-Sensitive mechanism and interferometric displacement measurement. IEEE Sens. J. 24(19), 29786–29794 (2024)

Article  Google Scholar 

X. Shan, L. Ding, D. Wang, S. Wen, J. Shi, C. Chen, Y. Wang, H. Zhu, Z. Huang, S.J. Shen, X. Wang, B. Zhong, P. Liu, J. Reece, W. Ren, W. Hao, X. Lu, J. Lu, Q.P. Su, Lingqian Chang, Lingdong Sun, Dayong Jin, L. Jiang, F. Wang, Sub-femtonewton force sensing in solution by super-resolved photonic force microscopy, Nature Photonics, 18, 913–921 (2024)

M. Zou, S. Liao, C. Liu, C. Xiong, J. Zhao, Z. Zhao, Y. Gan, K. Chen, D. Yang, Y. Liu, Y. Wang, Wang, Fiber-tip Polymer clamped-beam Probe for high-sensitivity Nanoforce Measurements, vol. 10 (Science & Applications, Light, 2021), p. 171

Google Scholar 

S. Cao, X. Shang, H. Yu, L. Shi, N. Zhang, M. Wang, M. Qiu, Two-photon direct laser writing of micro Fabry-Perot cavity on single-mode fiber for refractive index sensing. Opt. Express. 30, 25536–25543 (2022)

Article  ADS  Google Scholar 

C. Simin, S. Xinggang, Z. Lei, W. Ning, Q. Min, PDMS-filled micro-spring Fabry-Perot cavity for temperature sensing. Opt. Express. 31, 30332–30339 (2023)

Article  Google Scholar 

X. Shang, N. Wang, S. Cao, H. Chen, D. Fan, N. Zhou, M. Qiu, Fiber-Integrated force sensor using 3D printed Spring-Composed Fabry-Perot cavities with a high precision down to tens of Piconewton. Adv. Mater. 36, 2305121 (2024)

Article  Google Scholar 

E. Dalaka, J.S. Hill, J. H. H. Booth, A. Popczyk, S.R. Pulver, M.C. Gather, M. Schubert, Deformable microlaser force sensing, Light: Science & Applications, 13, 129 (2024)

N. Fardian-Melamed, A, Skripka, B. Ursprung, C. Lee, T.P. Darlington, A. Teitelboim, X. Qi, M. Wang, J.M. Gerton, B.E. Cohen, E.M. Chan, P.J. Schuck, Infrared nanosensors of Piconewton to micronewton forces. Nature. 637, 70–75 (2025)

Article  Google Scholar 

J. R. Casar, C.A. McLellan, C. Shi, A. Stiber, A. Lay, C. Siefe, A. Parakh, M. Gaerlan, X. Wendy Gu, M.B. Goodman, J. A. Dionne, Upconverting microgauges reveal intraluminal force dynamics in vivo. Nature. 637, 76–83 (2025)

Article  Google Scholar 

Y. Liu, G. Zou, J. She, B. Deng, H. Yang, Nanoscale physical parameters of source rocks identified by atomic force microscopy: A review. Geol. J. 57(10), 4345–4356 (2022)

Article  ADS  Google Scholar 

M. B Gerdroodbary, D.D. Ganji, R. Moradi, A. Abdollahi, Application of Knudsen thermal force for detection of CO2 in Low-Pressure Micro gas sensor. Fluid Dyn. 53, 812–823 (2018)

Article  ADS  Google Scholar 

Y. Chen, D. Lu, H. Xing, H. Ding, J. Luo, H. Liu, X. Kong, F. Xu, Recent progress in MEMS Fiber-Optic Fabry–Perot pressure sensors. Sensors. 24(4), 1079 (2024)

Article  ADS  Google Scholar 

J.D. Müller, A.C. Dumitru, C.L. Giudice, H.E. Gaub, P. Hinterdorfer, G. Hummer, J. J. De Yoreo, Y. F. Dufrêne, Alsteens, Atomic force Microscopy-Based force spectroscopy and multiparametric imaging of biomolecular and cellular systems. Chem. Rev. 121(19), 11701–11725 (2021)

Article  Google Scholar 

M.F. Jadidi, Z. Gholamvand, G.L.W. Cross, High-resolution micro-cavity filling sensing by fiber optic interferometry. Rev. Sci. Instrum. 94(1), 015001 (2023)

Article  ADS  Google Scholar 

J. Rothman, P. Bleuet, L. Andre, Q. Abadie, G. Bordot, S. Bisotto, G. Audoit, J.-A. Nicolas, B. Dupont, J.-P. Rostand, G. Lasfargues, HgCdTe APDs for free space optical communications, Proceedings of SPIE 10524, Free-Space Laser Communication and Atmospheric Propagation XXX, 1052411 (2018)

M.-J. Sun, H.-Y. Wang, J.-Y. Huang, Improving the performance of computational ghost imaging by using a quadrant detector and digital micro-scanning. Sci. Rep. 9, 4105 (2019)

Article  ADS  Google Scholar 

R.V. Balmashnov, A.F. Kornev, I.G. Kuchma, Adaptive compensator of thermally induced lens with analyzer based on quadrant photodiode, 2018 International Conference Laser Optics (ICLO), St. Petersburg, Russia, 189–189 (2018)

Comments (0)

No login
gif