Impact of Post-Deposition Heat Treatment on the Microstructure and Mechanical Properties of Boron Nitride Thin Films Prepared by Radio Frequency Magnetron Sputtering

Impact of Post-Deposition Heat Treatment on the Microstructure and Mechanical Properties of Boron Nitride Thin Films Prepared by Radio Frequency Magnetron Sputtering | Physics and Chemistry of Solid State Physics and Chemistry of Solid State (PCSS) | Open Access Journal

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