Impact of Post-Deposition Heat Treatment on the Microstructure and Mechanical Properties of Boron Nitride Thin Films Prepared by Radio Frequency Magnetron Sputtering
Impact of Post-Deposition Heat Treatment on the Microstructure and Mechanical Properties of Boron Nitride Thin Films Prepared by Radio Frequency Magnetron Sputtering
| Physics and Chemistry of Solid State
Physics and Chemistry of Solid State (PCSS) | Open Access Journal
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