Document Type : Original Research Paper

Authors

1 aDepartment of chemistry, Faculty of Basic Sciences, Sciences and Research Branch, Islamic Azad University, Tehran, Iran

2 Islamic azad university

3 Plasma Physics Research Center, Science and Research Branch, Islamic Azad University

4 Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran

5 Department of Chemistry , ShahrQods Branch, Islamic Azad University , ShahreQods , Iran

Abstract

Using DC- Plasma Enhanced Chemical Vapor Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures was investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Co nano-particles were used as the catalyst. The effect of preparing Co catalyst on temperatures of 240ο C and 350ο C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350ο-C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano- structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy were used to characterize the diamond-like carbon nano- structures produced under different conditions.

Using DC- Plasma Enhanced Chemical Vapor Deposition (PECVD) system, the impact of pure Co on the growth of diamond-like carbon (DLC) nano-structures was investigated. In this study, Acetylene (C2H2) was diluted in H2 and used as the reaction gas and Co nano-particles were used as the catalyst. The effect of preparing Co catalyst on temperatures of 240ο C and 350ο C and growth conditions was studied. The results showed that the Co catalyst sputtering at 350ο-C temperature has a significant impact on purity, morphology, and synthesized diamond-like carbon nano- structures. This research was conducted to investigate the effect of catalyst preparation and growth conditions. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy were used to characterize the diamond-like carbon nano- structures produced under

Keywords