Microcrystalline diamond film evaluation by spectroscopic optical coherence tomography

Paulina Strąkowska, Marcin Robert Strąkowski

Abstract
This study has focused on the microcrystalline diamond film (MCD) thickness evaluation. For this purpose, optical coherence tomography (OCT) enhanced by spectroscopic analysis has been used as a method of choice. The average thickness of the tested layer was about 1.5 µm, which is below the standard 2-point OCT resolution. In this case, the usefulness of the spectroscopic analysis was confirmed for the evaluation of the thickness changes in the submicrometer range.

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Keywords

Diamond film, OCT, MCD

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Photonics Letters of Poland - A Publication of the Photonics Society of Poland
Published in cooperation with SPIE

ISSN: 2080-2242